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Experimental evidence of warm electron populations in magnetron sputtering plasmas.
- Source :
- Journal of Applied Physics; 1/21/2015, Vol. 117 Issue 3, p033301-1-033301-9, 9p, 1 Diagram, 1 Chart, 5 Graphs
- Publication Year :
- 2015
-
Abstract
- This work report on the results obtained using the Langmuir probe (LP) measurements in high-power dc magnetron sputtering discharges. Data show clear evidence of two electron components, such as warm and bulk electrons, in the sputtering plasma in a magnetic trap. We have also used optical emission spectroscopy diagnostic method along with LP to investigate the plasma production. Data show that there is a presence of low-frequency oscillations in the 2-3MHz range, which are expected to be generated by high-frequency waves. Analysis also suggests that the warm electrons, in the plasmas, can be formed due to the collisionless Landau damping of the bulk electrons. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 117
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 100569905
- Full Text :
- https://doi.org/10.1063/1.4905901