Applications of Superconducting Re-Entrant Microwave Cavities

Abstract: This thesis describes the design, fabrication, and characterization of 3D superconducting microwave cavities for two applications. It first describes a cryogenically compatible microwave filter that is able to tune its resonant frequency by an unprecedented 5 GHz via deformation caused by a a helium pressure vessel. Then, it describes a novel microwave optomechanics device where such a cavity is coupled to an aluminized SiN membrane. It demonstrates that this device can be back-action cooled from the 450 mK base temperature of the cryostat down to 160 mK.