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Radiofrequency-plasma-deposited hydrogenated fluorinated silicon-carbon alloy films.
- Source :
-
Physical review. B, Condensed matter [Phys Rev B Condens Matter] 1989 Aug 15; Vol. 40 (6), pp. 3830-3836. - Publication Year :
- 1989
Details
- Language :
- English
- ISSN :
- 0163-1829
- Volume :
- 40
- Issue :
- 6
- Database :
- MEDLINE
- Journal :
- Physical review. B, Condensed matter
- Publication Type :
- Academic Journal
- Accession number :
- 9992352
- Full Text :
- https://doi.org/10.1103/physrevb.40.3830