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Friction-enhanced formation of Cu microwire on Si wafer.

Authors :
Liu C
Song Y
Chai Z
Zeng H
Tian Y
Meng Y
Source :
Nanotechnology [Nanotechnology] 2024 Nov 29; Vol. 36 (7). Date of Electronic Publication: 2024 Nov 29.
Publication Year :
2024

Abstract

Tribological printing is emerging as a promising technique for micro/nano manufacturing. A significant challenge is enhancing efficiency and minimizing the need for thousands of sliding cycles to create nano- or microstructures (2018 ACS Appl. Mater. Inter. 10  335-47, 2019 Nanotechnology 30  302 ). This study presents a rapid approach for forming Cu microwires on Si wafers through a friction method during the evaporation of an ethanol-based lubricant containing Cu nanoparticles. The preparation time is influenced by the volume of the lubricant added, with optimal conditions reducing the time to 300 s (600 sliding cycles) for producing Cu microwires with a thickness of 200 nm. Key aspects include the lubricating effect of ethanol on the friction pairs and the role of ethanol evaporation in the growth of Cu microwires. Successful formation requires a careful balance between microwire thickening and wear removal. The resulting Cu microwires demonstrate mechanical and electrical properties that make them suitable as micro conductors. This work provides a novel approach for fabricating conductive microstructures on Si surfaces and other curved surfaces, offering potential applications in microelectronics and sensor technologies.<br /> (© 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.)

Details

Language :
English
ISSN :
1361-6528
Volume :
36
Issue :
7
Database :
MEDLINE
Journal :
Nanotechnology
Publication Type :
Academic Journal
Accession number :
39571183
Full Text :
https://doi.org/10.1088/1361-6528/ad958d