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Antimony-Platinum Modulated Contact Enabling Majority Carrier Polarity Selection on a Monolayer Tungsten Diselenide Channel.

Authors :
Lin YT
Hsu CH
Chou AS
Fong ZY
Chuu CP
Chang SJ
Hsu YW
Chou SA
Liew SL
Chiu TY
Hou FR
Ni IC
Hou DV
Cheng CC
Radu IP
Wu CI
Source :
Nano letters [Nano Lett] 2024 Jul 24; Vol. 24 (29), pp. 8880-8886. Date of Electronic Publication: 2024 Jul 09.
Publication Year :
2024

Abstract

We develop a novel metal contact approach using an antimony (Sb)-platinum (Pt) bilayer to mitigate Fermi-level pinning in 2D transition metal dichalcogenide channels. This strategy allows for control over the transport polarity in monolayer WSe <subscript>2</subscript> devices. By adjustment of the Sb interfacial layer thickness from 10 to 30 nm, the effective work function of the contact/WSe <subscript>2</subscript> interface can be tuned from 4.42 eV (p-type) to 4.19 eV (n-type), enabling selectable n-/p-FET operation in enhancement mode. The shift in effective work function is linked to Sb-Se bond formation and an emerging n-doping effect. This work demonstrates high-performance n- and p-FETs with a single WSe <subscript>2</subscript> channel through Sb-Pt contact modulation. After oxide encapsulation, the maximum current density at |V <subscript>D</subscript> | = 1 V reaches 170 μA/μm for p-FET and 165 μA/μm for n-FET. This approach shows promise for cost-effective CMOS transistor applications using a single channel material and metal contact scheme.

Details

Language :
English
ISSN :
1530-6992
Volume :
24
Issue :
29
Database :
MEDLINE
Journal :
Nano letters
Publication Type :
Academic Journal
Accession number :
38981026
Full Text :
https://doi.org/10.1021/acs.nanolett.4c01436