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Correction: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process.

Authors :
Li Y
Worsey E
Bleiker SJ
Edinger P
Kulsreshath MK
Tang Q
Takabayashi AY
Quack N
Verheyen P
Bogaerts W
Gylfason KB
Pamunuwa D
Niklaus F
Source :
Nanoscale [Nanoscale] 2023 Nov 30; Vol. 15 (46), pp. 18940. Date of Electronic Publication: 2023 Nov 30.
Publication Year :
2023

Abstract

Correction for 'Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process' by Yingying Li et al. , Nanoscale , 2023, https://doi.org/10.1039/d3nr03429a.

Details

Language :
English
ISSN :
2040-3372
Volume :
15
Issue :
46
Database :
MEDLINE
Journal :
Nanoscale
Accession number :
37965952
Full Text :
https://doi.org/10.1039/d3nr90214e