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In-Grain Ferroelectric Switching in Sub-5 nm Thin Al 0.74 Sc 0.26 N Films at 1 V.
- Source :
-
Advanced science (Weinheim, Baden-Wurttemberg, Germany) [Adv Sci (Weinh)] 2023 Sep; Vol. 10 (25), pp. e2302296. Date of Electronic Publication: 2023 Jun 29. - Publication Year :
- 2023
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Abstract
- Analog switching in ferroelectric devices promises neuromorphic computing with the highest energy efficiency if limited device scalability can be overcome. To contribute to a solution, one reports on the ferroelectric switching characteristics of sub-5 nm thin Al <subscript>0.74</subscript> Sc <subscript>0.26</subscript> N films grown on Pt/Ti/SiO <subscript>2</subscript> /Si and epitaxial Pt/GaN/sapphire templates by sputter-deposition. In this context, the study focuses on the following major achievements compared to previously available wurtzite-type ferroelectrics: 1) Record low switching voltages down to 1 V are achieved, which is in a range that can be supplied by standard on-chip voltage sources. 2) Compared to the previously investigated deposition of ultrathin Al <subscript>1-x</subscript> Sc <subscript>x</subscript> N films on epitaxial templates, a significantly larger coercive field (E <subscript>c</subscript> ) to breakdown field ratio is observed for Al <subscript>0.74</subscript> Sc <subscript>0.26</subscript> N films grown on silicon substrates, the technologically most relevant substrate-type. 3) The formation of true ferroelectric domains in wurtzite-type materials is for the first time demonstrated on the atomic scale by scanning transmission electron microscopy (STEM) investigations of a sub-5 nm thin partially switched film. The direct observation of inversion domain boundaries (IDB) within single nm-sized grains supports the theory of a gradual domain-wall driven switching process in wurtzite-type ferroelectrics. Ultimately, this should enable the analog switching necessary for mimicking neuromorphic concepts also in highly scaled devices.<br /> (© 2023 The Authors. Advanced Science published by Wiley-VCH GmbH.)
Details
- Language :
- English
- ISSN :
- 2198-3844
- Volume :
- 10
- Issue :
- 25
- Database :
- MEDLINE
- Journal :
- Advanced science (Weinheim, Baden-Wurttemberg, Germany)
- Publication Type :
- Academic Journal
- Accession number :
- 37382398
- Full Text :
- https://doi.org/10.1002/advs.202302296