Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications.

MLA

Xue, Gaopeng, et al. “Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications.” Micromachines, vol. 13, no. 8, Aug. 2022. EBSCOhost, https://doi.org/10.3390/mi13081287.

APA

Xue, G., Toda, M., Li, X., Li, B., & Ono, T. (2022). Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications. Micromachines, 13(8). https://doi.org/10.3390/mi13081287

Chicago

Xue, Gaopeng, Masaya Toda, Xinghui Li, Bing Li, and Takahito Ono. 2022. “Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications.” Micromachines 13 (8). doi:10.3390/mi13081287.