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Operando photoelectron spectroscopy analysis of graphene field-effect transistors.
- Source :
-
Nanotechnology [Nanotechnology] 2022 Aug 30; Vol. 33 (47). Date of Electronic Publication: 2022 Aug 30. - Publication Year :
- 2022
-
Abstract
- In this study, operando photoelectron spectroscopy was used to characterize the performance of graphene field-effect transistors under working conditions. By sweeping the back-gate voltages, the carrier concentration of the graphene channel on the 150 nm Si <subscript>3</subscript> N <subscript>4</subscript> /Si substrate was tuned. From the C1s core level spectra acquired under the application of different gate voltages, the binding energy shifts caused by electric-field effects were obtained and analyzed. Together with the C1s peak shape information and the photoluminescence spectrum of the Si <subscript>3</subscript> N <subscript>4</subscript> /Si substrate, the presence of local potential across the x-ray beam spot associated with defects and gate leakage current in amorphous Si <subscript>3</subscript> N <subscript>4</subscript> was identified. The presence of defects in Si <subscript>3</subscript> N <subscript>4</subscript> /Si substrate could not only screen the partial electric field generated by the back gate but also serve as long-range scattering centers to the carriers, thus affecting charge transport in the graphene channel. Our findings will help further investigate the dielectric/graphene interface properties and accelerate the utilization of graphene in real device applications.<br /> (© 2022 IOP Publishing Ltd.)
Details
- Language :
- English
- ISSN :
- 1361-6528
- Volume :
- 33
- Issue :
- 47
- Database :
- MEDLINE
- Journal :
- Nanotechnology
- Publication Type :
- Academic Journal
- Accession number :
- 35940064
- Full Text :
- https://doi.org/10.1088/1361-6528/ac87b6