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Local Epitaxial Templating Effects in Ferroelectric and Antiferroelectric ZrO 2 .
- Source :
-
ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2022 Aug 17; Vol. 14 (32), pp. 36771-36780. Date of Electronic Publication: 2022 Aug 05. - Publication Year :
- 2022
-
Abstract
- Nanoscale polycrystalline thin-film heterostructures are central to microelectronics, for example, metals used as interconnects and high-K oxides used in dynamic random-access memories (DRAMs). The polycrystalline microstructure and overall functional response therein are often dominated by the underlying substrate or layer, which, however, is poorly understood due to the difficulty of characterizing microstructural correlations at a statistically meaningful scale. Here, an automated, high-throughput method, based on the nanobeam electron diffraction technique, is introduced to investigate orientational relations and correlations between crystallinity of materials in polycrystalline heterostructures over a length scale of microns, containing several hundred individual grains. This technique is employed to perform an atomic-scale investigation of the prevalent near-coincident site epitaxy in nanocrystalline ZrO <subscript>2</subscript> heterostructures, the workhorse system in DRAM technology. The power of this analysis is demonstrated by answering a puzzling question: why does polycrystalline ZrO <subscript>2</subscript> transform dramatically from being antiferroelectric on polycrystalline TiN/Si to ferroelectric on amorphous SiO <subscript>2</subscript> /Si?
Details
- Language :
- English
- ISSN :
- 1944-8252
- Volume :
- 14
- Issue :
- 32
- Database :
- MEDLINE
- Journal :
- ACS applied materials & interfaces
- Publication Type :
- Academic Journal
- Accession number :
- 35929399
- Full Text :
- https://doi.org/10.1021/acsami.2c03151