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Calculation of the Absorbed Electron Energy 3D Distribution by the Monte Carlo Method, Presentation of the Proximity Function by Three Parameters α, β, η and Comparison with the Experiment.
- Source :
-
Materials (Basel, Switzerland) [Materials (Basel)] 2022 May 30; Vol. 15 (11). Date of Electronic Publication: 2022 May 30. - Publication Year :
- 2022
-
Abstract
- The paper presents a program for simulating electron scattering in layered materials ProxyFn . Calculations show that the absorbed energy density is three-dimensional, while the contribution of the forward-scattered electrons is better described by a power function rather than the commonly used Gaussian. It is shown that for the practical correction of the proximity effect, it is possible, nevertheless, to use the classical two-dimensional proximity function containing three parameters: α, β, η. A method for determining the parameters α, β, η from three-dimensional calculations based on MC simulation and development consideration is proposed. A good agreement of the obtained parameters and experimental data for various substrates and electron energies is shown. Thus, a method for calculating the parameters of the classical proximity function for arbitrary layered substrates based on the Monte Carlo simulation has been developed.
Details
- Language :
- English
- ISSN :
- 1996-1944
- Volume :
- 15
- Issue :
- 11
- Database :
- MEDLINE
- Journal :
- Materials (Basel, Switzerland)
- Publication Type :
- Academic Journal
- Accession number :
- 35683186
- Full Text :
- https://doi.org/10.3390/ma15113888