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Spectral and polarization based imaging in deep-ultraviolet excited photoelectron microscopy.

Authors :
Beechem TE
Smith SW
Copeland RG
Liu F
Ohta T
Source :
The Review of scientific instruments [Rev Sci Instrum] 2022 May 01; Vol. 93 (5), pp. 053701.
Publication Year :
2022

Abstract

Using photoelectron emission microscopy, nanoscale spectral imaging of atomically thin MoS <subscript>2</subscript> buried between Al <subscript>2</subscript> O <subscript>3</subscript> and SiO <subscript>2</subscript> is achieved by monitoring the wavelength and polarization dependence of the photoelectron signal excited by deep-ultraviolet light. Although photons induce the photoemission, images can exhibit resolutions below the photon wavelength as electrons sense the response. To validate this concept, the dependence of photoemission yield on the wavelength and polarization of the exciting light was first measured and then compared to simulations of the optical response quantified with classical optical theory. A close correlation between experiment and theory indicates that photoemission probes the optical interaction of UV-light with the material stack directly. The utility of this probe is then demonstrated when both the spectral and polarization dependence of photoemission observe spatial variation consistent with grains and defects in buried MoS <subscript>2</subscript> . Taken together, these new modalities of photoelectron microscopy allow mapping of optical property variation at length scales unobtainable with conventional light-based microscopy.

Details

Language :
English
ISSN :
1089-7623
Volume :
93
Issue :
5
Database :
MEDLINE
Journal :
The Review of scientific instruments
Publication Type :
Academic Journal
Accession number :
35649785
Full Text :
https://doi.org/10.1063/5.0077867