Very-high-frequency probes for atomic force microscopy with silicon optomechanics.

MLA

Schwab, L., et al. “Very-High-Frequency Probes for Atomic Force Microscopy with Silicon Optomechanics.” Microsystems & Nanoengineering, vol. 8, Mar. 2022, p. 32. EBSCOhost, https://doi.org/10.1038/s41378-022-00364-4.

APA

Schwab, L., Allain, P. E., Mauran, N., Dollat, X., Mazenq, L., Lagrange, D., Gély, M., Hentz, S., Jourdan, G., Favero, I., & Legrand, B. (2022). Very-high-frequency probes for atomic force microscopy with silicon optomechanics. Microsystems & Nanoengineering, 8, 32. https://doi.org/10.1038/s41378-022-00364-4

Chicago

Schwab, L, P E Allain, N Mauran, X Dollat, L Mazenq, D Lagrange, M Gély, et al. 2022. “Very-High-Frequency Probes for Atomic Force Microscopy with Silicon Optomechanics.” Microsystems & Nanoengineering 8 (March): 32. doi:10.1038/s41378-022-00364-4.