A synchrotron-based kilowatt-level radiation source for EUV lithography.

Authors :: Jiang B
Feng C
Li C
Bai Z
Wan W
Xiang D
Gu Q
Wang K
Zhang Q
Huang D
Chen S
Source :: Scientific reports [Sci Rep] 2022 Feb 28; Vol. 12 (1), pp. 3325. Date of Electronic Publication: 2022 Feb 28.
Publication Year :: 2022
Abstract: A compact damping ring with a limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the storage ring is modulated by a 257 nm wavelength seed laser with the help of the angular-dispersion-induced micro-bunching method (Feng and Zhao in Sci Rep 7:4724, 2017), coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.<br /> (© 2022. The Author(s).)