Highly sensitive vibration sensor based on the dispersion turning point microfiber Mach-Zehnder interferometer.

In the present work, we introduced a highly sensitive vibration sensor, which is based on the dispersion turning point (DTP) microfiber Mach-Zehnder interferometer. The axial strain and vibration sensing characteristics of the microfiber Mach-Zehnder interferometer were investigated. First, we theoretically analyzed the spectrum evolution characteristics of the microfiber Mach-Zehnder interferometer caused by axial strain. Second, the microfiber with different diameters was fabricated using the electrode discharge and fused taper method, and the axial strain experiments were conducted; the maximum sensitivity of the DTP microfiber with a diameter of ∼2.2 µm reached -45.55 pm/µɛ at ∼1550 nm. Finally, based on the axial strain principle of the microfiber, we designed a highly sensitive vibration sensor using a DTP microfiber integrated into a rectangular through-hole cantilever beam. The 30-3500 Hz vibration signal monitoring could be realized, the maximum signal-to-noise ratio (SNR) was ∼75 dB at 52 Hz, and the acceleration sensitivity reached as high as 0.764 V/g at 45Hz. These results suggested the high performance of the microfiber in axial strain and micro-vibration sensing fields.