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Wafer-Scale Functional Metasurfaces for Mid-Infrared Photonics and Biosensing.
- Source :
-
Advanced materials (Deerfield Beach, Fla.) [Adv Mater] 2021 Oct; Vol. 33 (43), pp. e2102232. Date of Electronic Publication: 2021 Sep 07. - Publication Year :
- 2021
-
Abstract
- Metasurfaces have emerged as a breakthrough platform for manipulating light at the nanoscale and enabling on-demand optical functionalities for next-generation biosensing, imaging, and light-generating photonic devices. However, translating this technology to practical applications requires low-cost and high-throughput fabrication methods. Due to the limited choice of materials with suitable optical properties, it is particularly challenging to produce metasurfaces for the technologically relevant mid-infrared spectral range. These constraints are overcome by realizing functional metasurfaces on almost completely transparent free-standing metal-oxide membranes. A versatile nanofabrication process is developed and implemented for highly efficient dielectric and plasmonic mid-infrared metasurfaces with wafer-scale and complementary metal-oxide-semiconductor (CMOS)-compatible manufacturing techniques. The advantages of this method are revealed by demonstrating highly uniform and functional metasurfaces, including high-Q structures enabling fine spectral selectivity, large-area metalenses with diffraction-limited focusing capabilities, and birefringent metasurfaces providing polarization control at record-high conversion efficiencies.  Aluminum plasmonic devices and their integration into microfluidics for real-time and label-free mid-infrared biosensing of proteins and lipid vesicles are further demonstrated. The versatility of this approach and its compatibility with mass-production processes bring infrared metasurfaces markedly closer to commercial applications, such as thermal imaging, spectroscopy, and biosensing.<br /> (© 2021 The Authors. Advanced Materials published by Wiley-VCH GmbH.)
Details
- Language :
- English
- ISSN :
- 1521-4095
- Volume :
- 33
- Issue :
- 43
- Database :
- MEDLINE
- Journal :
- Advanced materials (Deerfield Beach, Fla.)
- Publication Type :
- Academic Journal
- Accession number :
- 34494318
- Full Text :
- https://doi.org/10.1002/adma.202102232