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Volume Fabrication of Quantum Cascade Lasers on 200 mm-CMOS pilot line.
- Source :
-
Scientific reports [Sci Rep] 2020 Apr 10; Vol. 10 (1), pp. 6185. Date of Electronic Publication: 2020 Apr 10. - Publication Year :
- 2020
-
Abstract
- The manufacturing cost of quantum cascade lasers is still a major bottleneck for the adoption of this technology for chemical sensing. The integration of Mid-Infrared sources on Si substrate based on CMOS technology paves the way for high-volume low-cost fabrication. Furthermore, the use of Si-based fabrication platform opens the way to the co-integration of QCL Mid-InfraRed sources with SiGe-based waveguides, enabling realization of optical sensors fully integrated on planar substrate. We report here the fabrication and the characterization of DFB-QCL sources using top metal grating approach working at 7.4 µm fully implemented on our 200 mm CMOS pilot line. These QCL featured threshold current density of 2.5 kA/cm² and a linewidth of 0.16 cm <superscript>-1</superscript> with a high fabrication yield. This approach paves the way toward a Mid-InfraRed spectrometer at the silicon chip level.
Details
- Language :
- English
- ISSN :
- 2045-2322
- Volume :
- 10
- Issue :
- 1
- Database :
- MEDLINE
- Journal :
- Scientific reports
- Publication Type :
- Academic Journal
- Accession number :
- 32277096
- Full Text :
- https://doi.org/10.1038/s41598-020-63106-4