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Volume Fabrication of Quantum Cascade Lasers on 200 mm-CMOS pilot line.

Authors :
Coutard JG
Brun M
Fournier M
Lartigue O
Fedeli F
Maisons G
Fedeli JM
Nicoletti S
Carras M
Duraffourg L
Source :
Scientific reports [Sci Rep] 2020 Apr 10; Vol. 10 (1), pp. 6185. Date of Electronic Publication: 2020 Apr 10.
Publication Year :
2020

Abstract

The manufacturing cost of quantum cascade lasers is still a major bottleneck for the adoption of this technology for chemical sensing. The integration of Mid-Infrared sources on Si substrate based on CMOS technology paves the way for high-volume low-cost fabrication. Furthermore, the use of Si-based fabrication platform opens the way to the co-integration of QCL Mid-InfraRed sources with SiGe-based waveguides, enabling realization of optical sensors fully integrated on planar substrate. We report here the fabrication and the characterization of DFB-QCL sources using top metal grating approach working at 7.4 µm fully implemented on our 200 mm CMOS pilot line. These QCL featured threshold current density of 2.5 kA/cm² and a linewidth of 0.16 cm <superscript>-1</superscript> with a high fabrication yield. This approach paves the way toward a Mid-InfraRed spectrometer at the silicon chip level.

Details

Language :
English
ISSN :
2045-2322
Volume :
10
Issue :
1
Database :
MEDLINE
Journal :
Scientific reports
Publication Type :
Academic Journal
Accession number :
32277096
Full Text :
https://doi.org/10.1038/s41598-020-63106-4