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Hole free phase plate tomography for materials sciences samples.

Authors :
Hayashida M
Cui K
Najarian AM
McCreery R
Jehanathan N
Pawlowicz C
Motoki S
Kawasaki M
Konyuba Y
Malac M
Source :
Micron (Oxford, England : 1993) [Micron] 2019 Jan; Vol. 116, pp. 54-60. Date of Electronic Publication: 2018 Sep 07.
Publication Year :
2019

Abstract

We report, for the first time, the three dimensional reconstruction (3D) of a transistor from a microprocessor chip and roughness of molecular electronic junction obtained by electron tomography with Hole Free Phase Plate (HFPP) imaging. The HFPP appears to enhance contrast between inorganic materials and also increase the visibility of interfaces between different materials. We demonstrate that the degree of enhancement varies depending on material and thickness of the samples using experimental and simulation data.<br /> (Copyright © 2018. Published by Elsevier Ltd.)

Details

Language :
English
ISSN :
1878-4291
Volume :
116
Database :
MEDLINE
Journal :
Micron (Oxford, England : 1993)
Publication Type :
Academic Journal
Accession number :
30300824
Full Text :
https://doi.org/10.1016/j.micron.2018.09.005