Dispersion in Ferroelectric Switching Performance of Polycrystalline Hf 0.5 Zr 0.5 O 2 Thin Films.

Interests in nanoscale integrated ferroelectric devices using doped HfO ₂ -based thin films are actively reviving in academia and industry. The main driving force for the formation of the metastable non-centrosymmetric ferroelectric phase is considered to be the interface/grain boundary energy effect of the small grains in polycrystalline configuration. These small grains, however, can invoke unfavorable material properties, such as nonuniform switching performance. This study provides an in-depth understanding of such aspects of this material through careful measurement and modeling of the ferroelectric switching kinetics. Various previous switching models developed for conventional ferroelectric thin-film capacitors cannot fully account for the observed time- and voltage-dependent switching current evolution. The accurate fitting of the experimental results required careful consideration of the inhomogeneous field distribution across the electrode area, which could be acquired by an appropriate mathematical formulation of polarization as a function of electric field and time. Compared with the conventional polycrystalline Pb(Zr,Ti)O ₃ film, the statistical distribution of the local field was found to be three times wider. The activation field and characteristic time for domain switching were larger by more than 1 order of magnitude. It indicates that doped HfO ₂ is inhomogeneous and "hard" ferroelectric material compared with conventional perovskite-based ferroelectrics.