Silicon slot waveguide Fano resonator.

The growing interest for Fano resonators during the past decade is due to the narrow line shape observable in their optical spectra. The drastic phase shift occurring at the resonance yields a steep drop from a high to low amplitude. Fano resonances can be obtained by a combination of nanostructures. Such a system is extremely sensitive in terms of both geometrical parameters and environmental conditions. Here we study a complex arrangement of photonic crystal cavities and slot waveguides on a silicon chip. Our structure, composed of several cavities in parallel, has a particular response superimposing a shallow photonic bandgap and a resonance with a Fano line shape. It provides a low noise and a clear asymmetric resonance. We demonstrate it experimentally and show the potential of such a device for sensing. A sensitivity of 92 nm/RIU is measured.