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Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators.
- Source :
-
Journal of applied physics [J Appl Phys] 2017 Apr; Vol. 121, pp. 135303. - Publication Year :
- 2017
-
Abstract
- In this paper, strain transfer efficiencies from a single crystalline piezoelectric lead magnesium niobate-lead titanate substrate to a GaAs semiconductor membrane bonded on top are investigated using state-of-the-art x-ray diffraction (XRD) techniques and finite-element-method (FEM) simulations. Two different bonding techniques are studied, namely, gold-thermo-compression and polymer-based SU8 bonding. Our results show a much higher strain-transfer for the "soft" SU8 bonding in comparison to the "hard" bonding via gold-thermo-compression. A comparison between the XRD results and FEM simulations allows us to explain this unexpected result with the presence of complex interface structures between the different layers.
Details
- Language :
- English
- ISSN :
- 0021-8979
- Volume :
- 121
- Database :
- MEDLINE
- Journal :
- Journal of applied physics
- Publication Type :
- Academic Journal
- Accession number :
- 28522879
- Full Text :
- https://doi.org/10.1063/1.4979859