Epitaxial growth of Cu(001) thin films onto Si(001) using a single-step HiPIMS process.

MLA

Cemin, Felipe, et al. “Epitaxial Growth of Cu(001) Thin Films onto Si(001) Using a Single-Step HiPIMS Process.” Scientific Reports, vol. 7, no. 1, May 2017, p. 1655. EBSCOhost, https://doi.org/10.1038/s41598-017-01755-8.

APA

Cemin, F., Lundin, D., Furgeaud, C., Michel, A., Amiard, G., Minea, T., & Abadias, G. (2017). Epitaxial growth of Cu(001) thin films onto Si(001) using a single-step HiPIMS process. Scientific Reports, 7(1), 1655. https://doi.org/10.1038/s41598-017-01755-8

Chicago

Cemin, Felipe, Daniel Lundin, Clarisse Furgeaud, Anny Michel, Guillaume Amiard, Tiberiu Minea, and Gregory Abadias. 2017. “Epitaxial Growth of Cu(001) Thin Films onto Si(001) Using a Single-Step HiPIMS Process.” Scientific Reports 7 (1): 1655. doi:10.1038/s41598-017-01755-8.