Silicon technologies for arrays of Single Photon Avalanche Diodes.

Authors :: Gulinatti A
Ceccarelli F
Rech I
Ghioni M
Source :: Proceedings of SPIE--the International Society for Optical Engineering [Proc SPIE Int Soc Opt Eng] 2016 Apr 17; Vol. 9858. Date of Electronic Publication: 2016 May 05.
Publication Year :: 2016
Abstract: In order to fulfill the requirements of many applications, we recently developed a new technology aimed at combining the advantages of traditional thin and thick silicon Single Photon Avalanche Diodes (SPAD). In particular we demonstrated single-pixel detectors with a remarkable improvement in the Photon Detection Efficiency in the red/near-infrared spectrum (e.g. 40% at 800nm) while maintaining a timing jitter better than 100ps. In this paper we discuss the limitations of such Red-Enhanced (RE) technology from the point of view of the fabrication of small arrays of SPAD and we propose modifications to the structure aimed at overcoming these issues. We also report the first preliminary experimental results attained on devices fabricated adopting the improved structure.<br />Competing Interests: M. Ghioni discloses equity in Micro Photon Devices S.r.l. (MPD).

Language :: English
ISSN :: 0277-786X
Volume :: 9858
Database :: MEDLINE
Journal :: Proceedings of SPIE--the International Society for Optical Engineering
Publication Type :: Academic Journal
Accession number :: 27761058
Full Text :: https://doi.org/10.1117/12.2223884