Information transfer of 25.5 nm-1 in a 1-MV field-emission transmission electron microscope.

Information transfer of a 1-MV field-emission transmission electron microscope (TEM) was improved by reducing mechanical vibrations and improving the stability of an acceleration voltage. The resulting mechanical stability was estimated from lattice fringes with an obtained spacing of 19.6 pm under achromatic conditions. This value corresponds to a vibration amplitude of <19.6 pm. The stability of the acceleration voltage was improved by reducing thermal noises in the power supply. As a result, 39.2-pm-spacing linear lattice fringes were obtained under chromatic conditions. This indicates that 25.5 nm(-1) information transfer was accomplished in the 1 MV field-emission TEM.
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