New parallel wavelength-dispersive spectrometer based on scanning electron microscope.

A new wavelength - dispersive X-ray spectrometer for scanning electron microscopy (SEM) has been developed. This spectrometer can cover an energy range from 50 eV to 1120 eV by using an array made of seventeen reflection zone plates. Soft X-ray emission spectra of simple elements of Li, Be, B, C, N, Ti, V, O, Cr, Mn, Fe, Co, Ni, Cu, Zn and Ga were measured. The overall energy resolving power on the order of E/ΔE ~80 to 160 has been demonstrated. Spectrometer with 200 reflection zone plates has been used as a multi-channel analyser in the energy range of 100 - 1000 eV for quasi - continuous spectra measurements. The predicted energy-resolving power on the order of E/ΔE = 50 has been achieved in the entire energy range.