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Selective nano-patterning of graphene using a heated atomic force microscope tip.
- Source :
-
The Review of scientific instruments [Rev Sci Instrum] 2014 Apr; Vol. 85 (4), pp. 045002. - Publication Year :
- 2014
-
Abstract
- In this study, we introduce a selective thermochemical nano-patterning method of graphene on insulating substrates. A tiny heater formed at the end of an atomic force microscope (AFM) cantilever is optimized by a finite element method. The cantilever device is fabricated using conventional micromachining processes. After preliminary tests of the cantilever device, nano-patterning experiments are conducted with various conducting and insulating samples. The results indicate that faster scanning speed and higher contact force are desirable to reduce the sizes of nano-patterns. With the experimental condition of 1 μm/s and 24 mW, the heated AFM tip generates a graphene oxide layer of 3.6 nm height and 363 nm width, on a 300 nm thick SiO2 layer, with a tip contact force of 100 nN.
Details
- Language :
- English
- ISSN :
- 1089-7623
- Volume :
- 85
- Issue :
- 4
- Database :
- MEDLINE
- Journal :
- The Review of scientific instruments
- Publication Type :
- Academic Journal
- Accession number :
- 24784648
- Full Text :
- https://doi.org/10.1063/1.4870588