Rolled-up TiO₂ optical microcavities for telecom and visible photonics.

The fabrication of high-quality-factor polycrystalline TiO₂ vertically rolled-up microcavities (VRUMs) by the controlled release of differentially strained TiO₂ bilayered nanomembranes, operating at both telecom and visible wavelengths, is reported. Optical characterization of these resonators reveals quality factors as high as 3.8×10³ in the telecom wavelength range (1520-1570 nm) by interfacing a TiO₂ VRUMs with a tapered optical fiber. In addition, a splitting in the fundamental modes is experimentally observed due to the broken rotational symmetry in our resonators. This mode splitting indicates coupling between clockwise and counterclockwise traveling whispering gallery modes of the VRUMs. Moreover, we show that our biocompatible rolled-up TiO₂ resonators function at several positions along the tube, making them promising candidates for multiplexing and biosensing applications.