Relations between subsurface damage depth and surface roughness of grinded fused silica.

Relationships between subsurface damage (SSD) depth and peak to valley surface roughness (Rt) have been widely studied and present a major interest for an easy assessment of the SSD depth. We look at the relation between SSD depth and other surface roughness parameters using the Abbott-Firestone curve on a large campaign of grinding tests (with different abrasive grain size, grinding speed and grinding mode). The results reveal that Abbott-Firestone parameters are better for an assessment of SSD depth and that relationships between SSD depth and surface roughness are not universal but depend on the grinding process.