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A zirconium dioxide ammonia microsensor integrated with a readout circuit manufactured using the 0.18 μm CMOS process.

Authors :
Lin GM
Dai CL
Yang MZ
Source :
Sensors (Basel, Switzerland) [Sensors (Basel)] 2013 Mar 15; Vol. 13 (3), pp. 3664-74. Date of Electronic Publication: 2013 Mar 15.
Publication Year :
2013

Abstract

The study presents an ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated sensor chip consists of a heater, an ammonia sensor and a readout circuit. The ammonia sensor is constructed by a sensitive film and the interdigitated electrodes. The sensitive film is zirconium dioxide that is coated on the interdigitated electrodes. The heater is used to provide a working temperature to the sensitive film. A post-process is employed to remove the sacrificial layer and to coat zirconium dioxide on the sensor. When the sensitive film adsorbs or desorbs ammonia gas, the sensor produces a change in resistance. The readout circuit converts the resistance variation of the sensor into the output voltage. The experiments show that the integrated ammonia sensor has a sensitivity of 4.1 mV/ppm.

Details

Language :
English
ISSN :
1424-8220
Volume :
13
Issue :
3
Database :
MEDLINE
Journal :
Sensors (Basel, Switzerland)
Publication Type :
Academic Journal
Accession number :
23503294
Full Text :
https://doi.org/10.3390/s130303664