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On-chip integrated mid-infrared GaAs/AlGaAs Mach-Zehnder interferometer.
- Source :
-
Analytical chemistry [Anal Chem] 2013 Mar 19; Vol. 85 (6), pp. 3050-2. Date of Electronic Publication: 2012 Nov 26. - Publication Year :
- 2013
-
Abstract
- We report the design, fabrication, and first functional verification of mid-infrared (MIR; 3-12 μm) Mach-Zehnder interferometers (MZIs). The developed MIR-MZIs are entirely chip-integrated solid-state devices based on GaAs/AlGaAs technology waveguide fabricated via conventional optical lithography and reactive ion etching (RIE). Thus, fabricated MIR-MZIs were combined with a broadly tunable quantum cascade laser (tQCL) providing a wavelength coverage of 5.78-6.35 μm. MIR-MZIs have been designed with a waveguide width of 5 μm to ensure single mode behavior, avoiding optically undefined interference patterns. Several structures with different opening angles of the Y-junction were fabricated and tested for maximizing IR radiation throughput. This study demonstrates the feasibility of the very first chip-integrated mid-infrared Mach-Zehnder structures via interference patterns produced by minute amounts of water deposited at different positions of the MIR-MZI structure.
Details
- Language :
- English
- ISSN :
- 1520-6882
- Volume :
- 85
- Issue :
- 6
- Database :
- MEDLINE
- Journal :
- Analytical chemistry
- Publication Type :
- Academic Journal
- Accession number :
- 23131036
- Full Text :
- https://doi.org/10.1021/ac302551s