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Compositional analysis with atomic column spatial resolution by 5th-order aberration-corrected scanning transmission electron microscopy.
- Source :
-
Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada [Microsc Microanal] 2011 Aug; Vol. 17 (4), pp. 578-81. Date of Electronic Publication: 2011 May 27. - Publication Year :
- 2011
-
Abstract
- We show in this article that it is possible to obtain elemental compositional maps and profiles with atomic-column resolution across an InxGa1-xAs multilayer structure from 5th-order aberration-corrected high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) images. The compositional profiles obtained from the analysis of HAADF-STEM images describe accurately the distribution of In in the studied multilayer in good agreement with Muraki's segregation model [Muraki, K., Fukatsu, S., Shiraki, Y. & Ito, R. (1992). Surface segregation of In atoms during molecular beam epitaxy and its influence on the energy levels in InGaAs/GaAs quantums wells. Appl Phys Lett 61, 557-559].
Details
- Language :
- English
- ISSN :
- 1435-8115
- Volume :
- 17
- Issue :
- 4
- Database :
- MEDLINE
- Journal :
- Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
- Publication Type :
- Academic Journal
- Accession number :
- 21615979
- Full Text :
- https://doi.org/10.1017/S1431927611000213