Efficient methods of nanoimprint stamp cleaning based on imprint self-cleaning effect.

MLA

Meng, Fantao, et al. “Efficient Methods of Nanoimprint Stamp Cleaning Based on Imprint Self-Cleaning Effect.” Nanotechnology, vol. 22, no. 18, May 2011, p. 185301. EBSCOhost, https://doi.org/10.1088/0957-4484/22/18/185301.

APA

Meng, F., Luo, G., Maximov, I., Montelius, L., Zhou, Y., Nilsson, L., Carlberg, P., Heidari, B., Chu, J., & Xu, H. Q. (2011). Efficient methods of nanoimprint stamp cleaning based on imprint self-cleaning effect. Nanotechnology, 22(18), 185301. https://doi.org/10.1088/0957-4484/22/18/185301

Chicago

Meng, Fantao, Gang Luo, Ivan Maximov, Lars Montelius, Ye Zhou, Lars Nilsson, Patrick Carlberg, Babak Heidari, Jinkui Chu, and H Q Xu. 2011. “Efficient Methods of Nanoimprint Stamp Cleaning Based on Imprint Self-Cleaning Effect.” Nanotechnology 22 (18): 185301. doi:10.1088/0957-4484/22/18/185301.