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Lateral, Ge, nanowire growth on SiO2.

Authors :
Quitoriano NJ
Kamins TI
Source :
Nanotechnology [Nanotechnology] 2011 Feb 11; Vol. 22 (6), pp. 065201. Date of Electronic Publication: 2011 Jan 07.
Publication Year :
2011

Abstract

Vapor-liquid-solid (VLS) nanowires (NWs) typically grow in [111] directions. Previously, the authors have demonstrated guided Si NW growth, engineering the VLS NWs to grow in a [110] direction against a SiO(2) surface. In this work, the authors demonstrate guided high-quality Ge nanowire growth against a SiO(2) surface in the substrate plane to bridge between two Si mesas. The authors explore the interfaces between a Ge NW and the two Si device-layer mesas and report high-quality, epitaxial interfaces between the Ge NW and both Si mesas.

Details

Language :
English
ISSN :
1361-6528
Volume :
22
Issue :
6
Database :
MEDLINE
Journal :
Nanotechnology
Publication Type :
Academic Journal
Accession number :
21212486
Full Text :
https://doi.org/10.1088/0957-4484/22/6/065201