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EUV efficiency of a 6000-grooves mm(-1) diffraction grating.
- Source :
-
Applied optics [Appl Opt] 1990 May 01; Vol. 29 (13), pp. 1866-7. - Publication Year :
- 1990
-
Abstract
- We present measurements of the efficiency and large-angle scattering of a very high line density, mechanically ruled,planar, uniform line-space diffraction grating at extreme ultraviolet wavelengths.
Details
- Language :
- English
- ISSN :
- 1559-128X
- Volume :
- 29
- Issue :
- 13
- Database :
- MEDLINE
- Journal :
- Applied optics
- Publication Type :
- Academic Journal
- Accession number :
- 20563097
- Full Text :
- https://doi.org/10.1364/AO.29.001866