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Effect of spurious reflection on phase shift interferometry.

Authors :
Ai C
Wyant JC
Source :
Applied optics [Appl Opt] 1988 Jul 15; Vol. 27 (14), pp. 3039-45.
Publication Year :
1988

Abstract

The phase errors caused by spurious reflection in Twyman-Green and Fizeau interferometers are studied. A practical algorithm effectively eliminating the error is presented. Two other algorithms are reviewed, and the results obtained using the three algorithms are compared.

Details

Language :
English
ISSN :
1559-128X
Volume :
27
Issue :
14
Database :
MEDLINE
Journal :
Applied optics
Publication Type :
Academic Journal
Accession number :
20531883
Full Text :
https://doi.org/10.1364/AO.27.003039