Atomic structure imaging beyond conventional resolution limits in the transmission electron microscope.

Transmission electron microscopy is an extremely powerful technique for direct characterization of local structure at the atomic scale. However, the resolution of this technique is fundamentally limited by the partial coherence of the electron beam. In this Letter we demonstrate a method that extends the ultimate resolution of the latest generation of aberration corrected transmission electron microscopes by 41% relative to that achievable using conventional axial imaging. Experimental results verify that a real space resolution of 78 pm has been achieved at 200 kV.