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Reactive ion etching of gold-nanoparticle-modified pyrolyzed photoresist films.

Reactive ion etching of gold-nanoparticle-modified pyrolyzed photoresist films.

Authors :
Polsky R
Washburn CM
Montano G
Liu H
Edwards TL
Lopez DM
Harper JC
Brozik SM
Wheeler DR
Source :
Small (Weinheim an der Bergstrasse, Germany) [Small] 2009 Nov; Vol. 5 (22), pp. 2510-3.
Publication Year :
2009

Details

Language :
English
ISSN :
1613-6829
Volume :
5
Issue :
22
Database :
MEDLINE
Journal :
Small (Weinheim an der Bergstrasse, Germany)
Publication Type :
Academic Journal
Accession number :
19714735
Full Text :
https://doi.org/10.1002/smll.200901007