Porous low dielectric constant materials for microelectronics.

MLA

Baklanov, Mikhail R., and Karen Maex. “Porous Low Dielectric Constant Materials for Microelectronics.” Philosophical Transactions. Series A, Mathematical, Physical, and Engineering Sciences, vol. 364, no. 1838, Jan. 2006, pp. 201–15. EBSCOhost, https://doi.org/10.1098/rsta.2005.1679.

APA

Baklanov, M. R., & Maex, K. (2006). Porous low dielectric constant materials for microelectronics. Philosophical Transactions. Series A, Mathematical, Physical, and Engineering Sciences, 364(1838), 201–215. https://doi.org/10.1098/rsta.2005.1679

Chicago

Baklanov, Mikhail R, and Karen Maex. 2006. “Porous Low Dielectric Constant Materials for Microelectronics.” Philosophical Transactions. Series A, Mathematical, Physical, and Engineering Sciences 364 (1838): 201–15. doi:10.1098/rsta.2005.1679.