Back to Search
Start Over
Suspended heated silicon platform for rapid thermal control of surface reactions with application to carbon nanotube synthesis.
- Source :
-
The Review of scientific instruments [Rev Sci Instrum] 2007 Aug; Vol. 78 (8), pp. 083901. - Publication Year :
- 2007
-
Abstract
- Rapid continuous thermal control of chemical reactions such as those for chemical vapor deposition (CVD) growth of nanotubes and nanowires cannot be studied using traditional reactors such as tube furnaces, which have large thermal masses. We present the design, modeling, and verification of a simple, low-cost reactor based on resistive heating of a suspended silicon platform. This system achieves slew rates exceeding 100 degrees C/s, enabling studies of rapid heating and thermal cycling. Moreover, the reaction surface is available for optical monitoring. A first-generation CVD apparatus encapsulates the heated silicon platform inside a sealed quartz tube, and initial experiments demonstrate growth of films of tangled single-wall and aligned multiwall carbon nanotubes using this system. The reactor can be straightforwardly scaled to larger or smaller substrate sizes and may be extended for a wide variety of reactions, for performing in situ reaction diagnostics, for chip-scale growth of nanostructures, and for rapid thermal processing of microelectronic and micromechanical devices.
- Subjects :
- Computer Systems
Computer-Aided Design
Crystallization methods
Equipment Design
Equipment Failure Analysis
Heating methods
Nanotechnology methods
Reproducibility of Results
Sensitivity and Specificity
Specimen Handling methods
Surface Properties
Crystallization instrumentation
Heating instrumentation
Nanotechnology instrumentation
Nanotubes, Carbon chemistry
Nanotubes, Carbon ultrastructure
Silicon
Specimen Handling instrumentation
Subjects
Details
- Language :
- English
- ISSN :
- 0034-6748
- Volume :
- 78
- Issue :
- 8
- Database :
- MEDLINE
- Journal :
- The Review of scientific instruments
- Publication Type :
- Academic Journal
- Accession number :
- 17764329
- Full Text :
- https://doi.org/10.1063/1.2760936