AES investigation of inhomogenous metal-insulator samples.

Authors :: Dobos G
Vida G
Tóth Z
Josepovits K
Source :: Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada [Microsc Microanal] 2005 Dec; Vol. 11 (6), pp. 567-71.
Publication Year :: 2005
Abstract: In this article, the secondary electron-emission properties of both vertically and laterally inhomogeneous samples are discussed. To study the effect of surface coverage, the total electron-emission yield of tungsten and niobium samples was measured as a function of primary electron energy and oxide thickness. A method is suggested to avoid charging difficulties during AES measurements of samples that consist of both metal and various insulator parts.

Subjects :: Electrons
Oxides
Reproducibility of Results
Surface Properties
Metals chemistry
Microscopy, Electron methods
Niobium chemistry
Tungsten chemistry

Language :: English
ISSN :: 1431-9276
Volume :: 11
Issue :: 6
Database :: MEDLINE
Journal :: Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
Publication Type :: Academic Journal
Accession number :: 17481335
Full Text :: https://doi.org/10.1017/S1431927605050658

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