Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane.

Authors :: Yanagitani T
Mishima N
Matsukawa M
Watanabe Y
Source :: IEEE transactions on ultrasonics, ferroelectrics, and frequency control [IEEE Trans Ultrason Ferroelectr Freq Control] 2007 Apr; Vol. 54 (4), pp. 701-4.
Publication Year :: 2007
Abstract: The (1120) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An over-moded resonator, a layered structure of metal electrode film/(1120) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (1120) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26).

Subjects :: Computer Simulation
Crystallization
Elasticity
Electric Impedance
Mechanics
Membranes, Artificial
Stress, Physiological
Computer-Aided Design
Electronics
Models, Theoretical
Transducers
Ultrasonics
Zinc Oxide chemistry

Language :: English
ISSN :: 0885-3010
Volume :: 54
Issue :: 4
Database :: MEDLINE
Journal :: IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Publication Type :: Report
Accession number :: 17441579
Full Text :: https://doi.org/10.1109/tuffc.2007.303

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