Reduction photolithography using microlens arrays: applications in gray scale photolithography.

MLA

Wu, Hongkai, et al. “Reduction Photolithography Using Microlens Arrays: Applications in Gray Scale Photolithography.” Analytical Chemistry, vol. 74, no. 14, July 2002, pp. 3267–73. EBSCOhost, https://doi.org/10.1021/ac020151f.

APA

Wu, H., Odom, T. W., & Whitesides, G. M. (2002). Reduction photolithography using microlens arrays: applications in gray scale photolithography. Analytical Chemistry, 74(14), 3267–3273. https://doi.org/10.1021/ac020151f

Chicago

Wu, Hongkai, Teri W Odom, and George M Whitesides. 2002. “Reduction Photolithography Using Microlens Arrays: Applications in Gray Scale Photolithography.” Analytical Chemistry 74 (14): 3267–73. doi:10.1021/ac020151f.