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Boron diffusion in strained Si1-xGex epitaxial layers.
- Source :
-
Physical review letters [Phys Rev Lett] 1993 Aug 09; Vol. 71 (6), pp. 883-886. - Publication Year :
- 1993
Details
- Language :
- English
- ISSN :
- 1079-7114
- Volume :
- 71
- Issue :
- 6
- Database :
- MEDLINE
- Journal :
- Physical review letters
- Publication Type :
- Academic Journal
- Accession number :
- 10055392
- Full Text :
- https://doi.org/10.1103/PhysRevLett.71.883