Back to Search
Start Over
Iterative deconvolution technique for measurements of diffraction-limited images on optical microscopes.
- Source :
-
Journal of Modern Optics . Dec2014 Supplement, Vol. 61, pS2-S9. 1p. - Publication Year :
- 2014
-
Abstract
- Diffraction limit is usually a thorny problem in an optical inspection system. In this investigation, a model-based deconvolution technique was developed to recover diffraction-limited images, where images with sizes smaller than the diffraction limit could be recognized. Experiments were carried out with a traditional microscope at 200× magnification coupled with a halogen light source for a series of line width samples. The point spread function of the imaging optics was first obtained from an estimated model and then combined with a nonlinear deconvolution algorithm to calculate the full width at half maximum and reconstruct the line widths. Experimental results indicate that a measurement error below one pixel size of the measurement system is achievable. Accordingly, the target of nanoscale line width inspection based on a low cost and real-time image processing technique can be fulfilled, which greatly increases the ability of nanoscaling on optical microscopes. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09500340
- Volume :
- 61
- Database :
- Academic Search Index
- Journal :
- Journal of Modern Optics
- Publication Type :
- Academic Journal
- Accession number :
- 99859437
- Full Text :
- https://doi.org/10.1080/09500340.2014.924596