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Cellular Automata Modeling of Microcrystalline Structure Formation.
- Source :
-
AIP Conference Proceedings . 2014, Vol. 1623, p419-422. 4p. 4 Graphs. - Publication Year :
- 2014
-
Abstract
- The paper discusses the problem of microcrystalline structure formation during magnetron sputtering. The authors suggest the model based on cellular automata approach combined with chemical kinetics considerations, briefly discuss a practical way for kinetic constants evaluation and derive their accurate values. The work numerically solves a particular problem of coating formation by magnetron sputter deposition in multicomponent chemically active plasma. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 0094243X
- Volume :
- 1623
- Database :
- Academic Search Index
- Journal :
- AIP Conference Proceedings
- Publication Type :
- Conference
- Accession number :
- 99538871
- Full Text :
- https://doi.org/10.1063/1.4898971