Influence of silicon content on the microstructure, mechanical and tribological properties of magnetron sputtered Ti–Mo–Si–N films.

MLA

Xu, Junhua, et al. “Influence of Silicon Content on the Microstructure, Mechanical and Tribological Properties of Magnetron Sputtered Ti–Mo–Si–N Films.” Vacuum, vol. 110, Dec. 2014, pp. 47–53. EBSCOhost, https://doi.org/10.1016/j.vacuum.2014.08.010.

APA

Xu, J., Ju, H., & Yu, L. (2014). Influence of silicon content on the microstructure, mechanical and tribological properties of magnetron sputtered Ti–Mo–Si–N films. Vacuum, 110, 47–53. https://doi.org/10.1016/j.vacuum.2014.08.010

Chicago

Xu, Junhua, Hongbo Ju, and Lihua Yu. 2014. “Influence of Silicon Content on the Microstructure, Mechanical and Tribological Properties of Magnetron Sputtered Ti–Mo–Si–N Films.” Vacuum 110 (December): 47–53. doi:10.1016/j.vacuum.2014.08.010.