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Formation and microstructural analysis of co-sputtered thin films consisting of cobalt nanograins...

Authors :
Delaunay, J.-J.
Hayashi, T.
Tomita, M.
Hirono, S.
Source :
Journal of Applied Physics. 9/1/1997, Vol. 82 Issue 5, p2200. 9p. 24 Black and White Photographs, 1 Diagram, 3 Charts, 3 Graphs.
Publication Year :
1997

Abstract

Studies the effect of annealing on the microstructure of co-sputtered thin films consisting of cobalt nanograins embedded in carbon. Control of the particle size; Variation in carbon concentration; Deposition chamber geometry.

Subjects

Subjects :
*THIN films
*NANOSTRUCTURES

Details

Language :
English
ISSN :
00218979
Volume :
82
Issue :
5
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
98917
Full Text :
https://doi.org/10.1063/1.366026