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Screen-offset printing for fine conductive patterns.

Authors :
Nomura, Ken-ichi
Ushijima, Hirobumi
Mitsui, Ryosuke
Takahashi, Seiya
Nakajima, Shin-ichiro
Source :
Microelectronic Engineering. Jul2014, Vol. 123, p58-61. 4p.
Publication Year :
2014

Abstract

Screen printing is a useful method for fabricating electrodes or signal wires of electronic devices. However, finer patterns, e.g., 50-μm-wide, are difficult to form. Herein, we introduce a newly developed printing technique called “screen-offset printing,” as a candidate method for solving this problem. In this process, first, ink patterns are screen-printed on a silicone-resin blanket; they are then transferred from the blanket to an object. In the present study, we analyze the features of screen-offset printing by observing printed conductive patterns, and elucidate the impact of this method by comparing the experimental results of screen-offset printing and conventional screen printing. In addition, we demonstrate the fabrication of fine patterns with a line and space ( L / S ) of 50/50 and 30/30 μm. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
01679317
Volume :
123
Database :
Academic Search Index
Journal :
Microelectronic Engineering
Publication Type :
Academic Journal
Accession number :
98851916
Full Text :
https://doi.org/10.1016/j.mee.2014.05.009