Preparation of Y-Ba-Cu-O high Tc superconducting thin films by plasma-assisted organometallic chemical vapor deposition.

Thin films of the high Tc superconducting Y-Ba-Cu metal oxide have been prepared for the first time by plasma-assisted organometallic chemical vapor deposition using β-diketonate chelates of Y, Ba, and Cu, Y(C11H19O2)3, Ba(C11H19O2)2, and Cu(C11H19O2)2 as starting materials, followed by post-annealing under a reduced pressure of oxygen stream. X-ray diffraction spectra indicate that the films deposited on the yttria-stabilized zirconia (YSZ) substrate have a significant preferential orientation of the crystallite c axis being perpendicular to the substrate surface. Four-probe resistivity measurements reveal the temperature of the onset of superconductivity at 91.6 K and zero resistance by 78.5 K. [ABSTRACT FROM AUTHOR]