Amorphous SiN:H dielectrics with low density of defects.

MLA

Hasegawa, S., et al. “Amorphous SiN:H Dielectrics with Low Density of Defects.” Applied Physics Letters, vol. 49, no. 19, Nov. 1986, p. 1272. EBSCOhost, https://doi.org/10.1063/1.97383.

APA

Hasegawa, S., Matuura, M., & Kurata, Y. (1986). Amorphous SiN:H dielectrics with low density of defects. Applied Physics Letters, 49(19), 1272. https://doi.org/10.1063/1.97383

Chicago

Hasegawa, S., M. Matuura, and Y. Kurata. 1986. “Amorphous SiN:H Dielectrics with Low Density of Defects.” Applied Physics Letters 49 (19): 1272. doi:10.1063/1.97383.